4-point-probe heating, Optimal temperature uniformity

Optimal temperature uniformity: The window is located in the center of the miniature heater for the highest temperature uniformity, which can be as high as 99%. In addition, the surrounding metal further reduces electrostatic effects.

Temperature uniformity deviation < 0.5%
Window Designs, Positioning Accurate

FIB lamellas: The circular shape of these windows and the absence of topography around these windows make them ideal for positioning.

High tilting: The elongated windows, placed perpendicular to the alpha tilt axis, offer optimal sample visibility at high tilt angles, perfect for tomography.

Viewable area: 850 μm²
Unique chip design greatly reduces bulging

o far bulging (height change of the membrane while changing temperature and therefore blurred images) was unavoidable.. The Nano-Chip design reduces the bulging phenomenon.

Bulging at 1300 °C < 7 μm
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